Le VT, Tran BQ, Nguyen KB, Vo TNT, Do TH, Ngo HD, et al. Effect of limited oxygen gas flux on properties of Al-doped ZnO films. Dong Thap University Journal of Science [Internet]. 2024 Jun. 26 [cited 2024 Jul. 3];13(5):113-20. Available from: https://dthujs.vn/index.php/dthujs/article/view/1665